Aziz, N. A. A., Z. Hussain, M. K. Osman, and S. Z. Yahaya. “EVOLUTION OF WAFER DEFECT DETECTION IN PHOTOLITHOGRAPHY: FROM CONVENTIONAL IMAGE PROCESSING TO DEEP LEARNING”. INTERNATIONAL JOURNAL OF INNOVATION AND INDUSTRIAL REVOLUTION (IJIREV), vol. 8, no. 27, Nov. 2026, pp. 01-24, doi:10.35631/IJIREV.827001.