AZIZ, N. A. A.; HUSSAIN, Z.; OSMAN, M. K.; YAHAYA, S. Z. DEEP LEARNING FOR WAFER DEFECT DETECTION AND CLASSIFICATION IN SEMICONDUCTOR PHOTOLITHOGRAPHY: A STRUCTURED REVIEW. INTERNATIONAL JOURNAL OF INNOVATION AND INDUSTRIAL REVOLUTION (IJIREV), [S. l.], v. 8, n. 27, p. 42–68, 2026. DOI: 10.35631/IJIREV.827003. Disponível em: https://www.gaexcellence.com/index.php/ijirev/article/view/9015. Acesso em: 15 nov. 2026.