AZIZ, N. A. A.; HUSSAIN, Z.; OSMAN, M. K.; YAHAYA, S. Z. EVOLUTION OF WAFER DEFECT DETECTION IN PHOTOLITHOGRAPHY: FROM CONVENTIONAL IMAGE PROCESSING TO DEEP LEARNING. INTERNATIONAL JOURNAL OF INNOVATION AND INDUSTRIAL REVOLUTION (IJIREV), [S. l.], v. 8, n. 27, p. 01–24, 2026. DOI: 10.35631/IJIREV.827001. Disponível em: https://www.gaexcellence.com/index.php/ijirev/article/view/9012. Acesso em: 15 nov. 2026.